ATS500 Research and Production Coater

New 500mm coating systems for research and production applications

ATS500 is a highly versatile coating system, designed for advanced research and production. It features touch-panel control and a wide range of process techniques, including ion beam. ATS is applied to electronics, optics and ion-assisted processes.

The ATS500 system is designed for research and small batch coating applications. Applications include OLED and organic electronics, photovoltaics and semiconductors.ATS500 systems can be configured for coating lenses and filters in optical applications.