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Glove Box Integrated Thin Film Deposition System
Glove Box Integrated Thin Film Deposition System
HHV is designed, manufactured and installed a modular Glove box integrated thin film deposition system for deposition of metals and organics onto oxygen/ moisture sensitive layers, including organic electronics Organic based photovoltaics (OPV) - Organic light-emitting diodes (OLED) - Flexible / organic electronics.
The integrated Glove Box System contains 3 main Glove Boxes (Workstation units), interconnected through valves, One for spin coater unit, one for Evaporator unit and the last one for Encapsulation unit.
The HHV Evaporator unit Model: TF600GB is designed for integration into glove box for metals, and organics thin-film deposition with sample handling in inert environments. The chamber is fitted with a vertically-opening front door which allows access from the glove box, while a hinged rear door allows access for service without compromising the glove box atmosphere.
Characteristics of glove box systems:
- Stainless-steel chamber with sliding door (hinged door on the back side for easy maintenance)
- Pneumatic locking system with sliding door
- Secured back door opening to avoid any accidental exposure to air
- Multi-mask processes
- Automated storage and transfer of mask and/or substrate carriers
- 5 level storage for single carrier stack (mask or substrate)
- Multi-substrate and multi-mask processes without breaking vacuum (allows complex multi-layer devices)
Advantages:
- Direct and easy access to process equipment via front side sliding door
- Convenient service access via back side hinged door
- Customized system configuration
- Integration of any process components
- Easy operation via full color touch- screen
All system components with exception of the sliding door are accessible from outside the glove box software allows user friendly recipe creation along with a reliable, uninterruptable processing module that allows process completion.
Full integrated process control with recipe control software management
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