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THIN FILM TECHNOLOGY

Precision equipment and deposition processes

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Glove Box Integrated Thin Film Deposition System

Glove Box Integrated Thin Film Deposition System


HHV is designed, manufactured and installed a modular Glove box integrated thin film deposition system for deposition of metals and organics  onto oxygen/ moisture sensitive layers, including organic electronics Organic based photovoltaics (OPV) - Organic light-emitting diodes (OLED) - Flexible / organic electronics.

The integrated Glove Box System contains 3 main Glove Boxes (Workstation units), interconnected through valves, One for spin coater unit, one for Evaporator unit and the last one for Encapsulation unit.

The HHV Evaporator unit Model: TF600GB is designed for integration into glove box for metals, and organics thin-film deposition with sample handling in inert environments. The chamber is fitted with a vertically-opening front door which allows access from the glove box, while a hinged rear door allows access for service without compromising the glove box atmosphere. 

Characteristics of glove box systems:

  • Stainless-steel chamber with sliding door (hinged door on the back side for easy maintenance)
  • Pneumatic locking system with sliding door
  • Secured back door opening to avoid any accidental exposure to air
  • Multi-mask processes
  • Automated storage and transfer of mask and/or substrate carriers
  • 5 level storage for single carrier stack (mask or substrate)
  • Multi-substrate and multi-mask processes without breaking vacuum (allows complex multi-layer devices)

Advantages:

  • Direct and easy access to process equipment via front side sliding door
  • Convenient service access via back side hinged door
  • Customized system configuration
  • Integration of any process components
  • Easy operation via full color touch- screen

All system components with exception of the sliding door are accessible from outside the glove box software allows user friendly recipe creation along with a reliable, uninterruptable processing module that allows process completion. 

Full integrated process control with recipe control software management




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T: +91 80 66703700

F: + 91 80 66703800

E: info@hhv.in , sed@hhv.in

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