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Lab Coater Auto500
The multi-purpose deposition system for Research & Development
Auto500 is a versatile front-loading coating system with box chamber for research & development or pre-production applications. The chamber accommodates large diameter substrates and allows a range of resistance evaporation, electron beam and sputter processes to be performed without breaking vacuum.
The front-loading chamber is mounted on a pedestal which also houses the vacuum system. A rugged PLC is used to control the vacuum while a full-height 19” equipment rack places the PLC screen and process accessory controls within easy reach of the operator.
The Auto500 can be configured with a single source or for multiple sources of different types to provide the user with great flexibility. The system can be upgraded with more or different accessories as requirements change.
The range of deposition sources is complemented by a range of work holders which provide for sample rotation, high-temperature heating and substrate bias.
A range of diffusion, turbo-molecular and cryo pumps is available to suit the widest range of requirements. Auto500 is also available with dry pumps for oil-free vacuum.
Details
- Features
- Application
- Accessories
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Large box chamber (500 mm diameter x 500 mm high)
Front-loading for easy access into the chamber
Extra feedthrough holes built into the side wall for extra process monitoring, Residual Gas Analyzers and other accessories
Standard Diffusion, Turbo, Cryo pumping options
Rack panel provides space for thin accessories and power supplies
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Anti-reflective coatings
Semiconductors
Mirrors
Dielectrics
Organics/polymers & OLEDs
Photonics research
Compound semiconductors
Solar cells
Nanotechnology
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- 400mm wide and 500mm wide stainless steel box chambers with options for water cooling
- Glass bell jar or glass cylinder chambers
- Single or multiple resistance sources, four position turret resistance source
- 3kW or 6kW multi-pocket electron beam source
- Static and rotary work holders
- High temperature substrate heating systems
- Source shutters and substrate shutters
- Glow discharge cleaning
- Film thickness monitoring and control systems
- Load lock options
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