Robotized sputter coater

Robotized sputter coater with magnetron facility

This coater has been designed with a Robot with suitable Electro-mechanical hardware Suitable to work / stand vacuum as well Argon environment. The Robot is kept in a  vacuum / Argon chamber and is fixed with Magnetron Source, which is programmed  with teaching aid to follow the contours.

The unit has five-axis  robot to carry on the coating process. It has been facilitated for uniform gas flow and the robot movemens inside the vacuum chamber as per the programme and for repeatable with uniform thickness coatings.