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Robotized sputter coater
Robotized sputter coater with magnetron facility
This coater has been designed with a Robot with suitable Electro-mechanical hardware Suitable to work / stand vacuum as well Argon environment. The Robot is kept in a vacuum / Argon chamber and is fixed with Magnetron Source, which is programmed with teaching aid to follow the contours.
The unit has five-axis robot to carry on the coating process. It has been facilitated for uniform gas flow and the robot movemens inside the vacuum chamber as per the programme and for repeatable with uniform thickness coatings.
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This coater has been designed with a Robot with suitable Electro-mechanical hardware Suitable to work / stand vacuum as well Argon environment
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Robotized sputter coater
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