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VACUUM TECHNOLOGY

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Technologies developed

Thin film (a-Si) solar technology is established with a stabilized efficiency of 7.5% over an area of 1 sq. ft. The process technology has been up-scaled to 1 sq. meter size with a stabilized efficiency of 6.5 %. The research and developmental work has been started to develop microcrystalline silicon thin films using an RF generator of frequency 27.12 MHz.

A new RF electrode structure has been developed and testing is underway. A new magnetron of high sputtering yield with isolated magnets has been developed

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